Anodic etching of SiC in alkaline solutions
نویسندگان
چکیده
منابع مشابه
Anisotropic Etching of Crystalline Silicon in Alkaline Solutions
The anisotropic etching behavior of single-crystal silicon and the behavior of SiO2 and Si3N4 in an ethylenediaminebased solution as well as in aqueous KOH, NaOH, and LiOH were studied. The crystal planes bounding the etch front and their etch rates were determined as a function of temperature, crystal orientation, and etchant composition. A correlation was found between the etch rates and thei...
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Alkaline etching of crystalline using KOH (potassium hydroxide), TMAH (tetramethyl ammonium hydroxide), or EDP (ethylenediamene pyrocatecol) is performed for creating various feature definition in MEMS (micro electrical mechanical structures, solar cells, and integrated circuit manufacturing. KOH will be discussed in this section. The alkaline chemistries have the ability to preferentially etch...
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We have demonstrated a method of producing nanoplatelets or complex well-ordered nanostructures from silicon carbide (SiC) whiskers. Preferential etching of SiC whiskers in a mixture of hydrofluoric and nitric acids (3:1 ratio) at 100 degrees C results in the selective removal of cubic SiC and the formation of complex structures resembling a pagoda architecture. Possible mechanisms governing se...
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Research and development in semiconducting silicon carbide (SiC) technology has produced significant progress in the past five years in many areas: material (bulk and thin film) growth, device fabrication, and applications. A major factor in this rapid growth has been the development of SiC bulk crystals and the availability of crystalline substrates. Current leading applications for SiC device...
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Titanium is a highly reactive metal so that a thin layer of oxide forms on its surface whenever exposed to the air or other environments containing oxygen. This layer increases the corrosion resistance of titanium. The oxide film is electrochemically formed through anodizing. In this study, anodizing of titanium was performed in phosphate-base solutions such as H3Po4, NaH2Po4, and Na2Hpo4 at 9....
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ژورنال
عنوان ژورنال: Journal of Micromechanics and Microengineering
سال: 2007
ISSN: 0960-1317,1361-6439
DOI: 10.1088/0960-1317/17/4/s04